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Thermal MEMS Mass Flow Sensing

How it works

Thermal MEMS Mass Flow Sensing uses microelectromechanical systems (MEMS) to measure gas flow by detecting temperature changes. It consists of a heated element and temperature sensors placed on a tiny chip. As gas flows over the heated element, it cools the element, altering its temperature. The MEMS sensors detect this temperature change, which correlates to the mass flow rate of the gas. This method provides precise, real-time measurements in compact, low-power devices.

Advantages

  • Compact Size: Small form factor suitable for integration into portable and miniaturized devices.

  • Low Power Consumption: Efficient energy use, ideal for battery-operated systems.

  • High Precision: Provides accurate measurements of gas flow rates.

  • Fast Response Time: Delivers real-time flow data for immediate analysis.

  • Durability: MEMS technology is robust and resistant to environmental factors.

  • Cost-Effective: Reduces manufacturing and operational costs due to its simple design and integration.

Enquire now

SensorX Solutions GmbH

Qubo Business Park

Kägiswilerstrasse 17

6060 Sarnen, Switzerland

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