Gas Mass Flow Controller
With proprietary MEMS flow sensing technologies

 

MFC4000 Series (Compact) and MFC2000 Series (Standard)

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The products utilize a proprietary micro- machined (MEMS) thermal calorimetric sensing technology, with time- domain data and data process technology. A thermal signal

generator with a pair of sensing elements up and downstream of the microheater is precisely manufactured and separated at predefined micrometer distances on a chip surface with excellent thermal isolation.

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Available for all standard industrial gases, across a wide range of flow rates from below 1 standard cubic centimeter per minute (sccm) upto hundreds of liters per minute (slpm).